Optically opaque materials present a series of challenges for alignment and overlay in the semi-damascene process flow or after the processing of the magnetic tunnel junction (MTJ) of a Magnetic ...
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Atomic-scale chip alignment: Laser holograms could set new standard for 3D semiconductor overlay accuracy
Scientists at the University of Massachusetts Amherst have introduced a novel method for aligning layers in chips using lasers and metalenses. The new technique is claimed to achieve accuracy down to ...
Overlay metrology tools improve accuracy while delivering acceptable throughput, addressing competing requirements in increasingly complex devices. In a race that never ends, on-product overlay ...
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