KLA-Tencor on Thursday rolled out its latest electron beam inspection tool, the eS32, saying it was tailored for front-end-of-line (FEOL) transistor apps, as well as back-end-of-line inspection. The ...
Optical inspection cannot resolve critical defects at advanced nodes and cannot detect subsurface defects. Especially at 7nm and below, many yield and reliability killer defects are the result of ...
SAN JOSE, Calif. — Applied Materials Inc. is quietly exiting the electron-beam and laser pattern-generation equipment markets, ending a painful and loss-ridden period in the competitive sectors, ...
Jena, Germany -- Jenoptik invests in a new electron-beam (E-Beam) lithography tool, which will go into operation at its Dresden, Germany site in mid-2022. The new E-Beam system will be built by the ...
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