荏原：新研磨装置を開発：ＣＭＰ装置「Ｆ－ＲＥＸ３００Ｘ」（動画）：　 EBARA: Developed new polishing equipment: CMP equipment “F-REX300X”：　 Ebara：开发了新的抛光设备：CMP设备“ F-REX300X”
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